镀膜对FE-SEM纳米尺度形貌观察的影响

Influence of Coating on the Micro Topography of Sample Observed with FE SEM

中文关键词:  场发射扫描电镜,镀膜,纳米尺度形貌

英文关键词:FE SEM,coating,micro topography

中文摘要:

      通过观察场发射扫描电子显微镜下非导电样品镀膜前后纳米尺度的形貌变化，发现镀膜对样品在几个纳米范围内的形貌有一定的影响和遮盖，分析了使用场发射扫描电镜观察样品高倍数形貌时应注意的问题，并给出了获取真实形貌的方法.

英文摘要:

      The different topography of the non-conducting samples with/without coating was observed and investigated by using FEG SEM. The results obtained demonstrate that the micro topography of nanometer order could be effected or covered in a certain extent. Accordingly, the observation methods and advice were suggested for non-conducting samples, which are not proper for coating with gold.