扫描电子显微镜对样品的要求及样品的制备
Requirements and Preparation of Scanning Electron Microscope Sample
投稿时间:2006-11-03  修订日期:2006-01-11
DOI:
中文关键词:  电子显微镜,样品要求,样品制备,样品镀膜,镀膜机
英文关键词:SEM,sample requirements,sample preparation,sample coating,coating system
基金项目:
作者单位
李剑平 烟台大学光电学院电镜室山东 烟台 264005 
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中文摘要:
      扫描电子显微镜对样品的要求很严,要求样品必须是固体,且做到五无:无毒、无放射性、无污染、无磁、无水分,成分稳定,块状样品大小要适中,粉末样品要进行特殊处理,对不导电和导电性能差的样品要进行镀膜,且要选择适当的镀膜仪,方能达到理想的分析效果.
英文摘要:
      The requirements for SEM samples are very strict,the sample must be a solid and non-toxic, non-radioactive, non-polluting, non-magnetic, non-moisture, the ingredients of the sample must be stable. The size of bulk sample should be moderate and the powder sample should be handled specially. In order to achieve the desired analysis results,the non-conductive sample should be coated with appropriate coating system.
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