|
| 红外椭圆偏振光谱及其应用 |
| Spectroscopic Infrared Ellipsometry and Its Application |
| 投稿时间：1997-12-25 修订日期：1998-03-08 |
| DOI： |
| 中文关键词: 傅里叶变换红外光谱 椭圆偏振 表面和薄膜测试 |
| 英文关键词:FTIR spectroscopy ellipsometry the surface and thin film measurement |
| 基金项目:国家自然科学基金 |
|
| 摘要点击次数: 1127 |
| 全文下载次数: 2 |
| 中文摘要: |
| 阐述了红外椭圆偏振光谱(Spectroscopic Infrared Elipsometry,简称SIRE)的原理、技术和发展.对国外SIRE的应用做了介绍并给出部分实例.共收集文献29篇. |
| 英文摘要: |
| The principle, technology and developement of spectroscopic infrared ellipsometry(SIRE) are introduced. Several given application examples show that such SIRE is an effective technical method in surface and thin film measurement. It covers 29 reference papers. |
| HTML 查看全文 查看/发表评论 下载PDF阅读器 |