|
微型集成化色谱仪 |
Integrated Micro-Chromatograph |
投稿时间:1993-09-01 修订日期:1994-12-29 |
DOI: |
中文关键词: 微型色谱 微制造技术 快速色谱 色谱设计 |
英文关键词:Micao-chromatograph micro-machining fast chromatogaphy design of chromatograph |
基金项目:国家科委;国家教委;中国科学院大型仪器功能开发基金 |
|
摘要点击次数: 990 |
全文下载次数: 2 |
中文摘要: |
用微制造技术和色谱原理结合,以全新的概念和设计思维研制色谱仪-微型集成化色谱仪.这种仪器的整个色谱部分在一个基片上制成.集微型进样器、细内径毛细管技和微型固体检测器于一体,功耗不过几瓦、重不过几百克,而分析速度比现有仪器提高近一个数量级,检测灵敏度可达10-6V/V.这种仪器的制作过程类似半导体器件,能大批量、性能高度重复可靠、而成本极为低廉地制造出来,彻底改变传统色谱仪器的生产方式.本文给出这种仪器的基本设计和制作原理,讨论研究重点,并介绍几个应用实例. |
英文摘要: |
An integrated micro gas chromatograph developed by using silicon micro machining technology and the principle of chromatography is introduced.The main GC parts including a micro injector,a narrow bore column and a solid state micro detector are integrated on one wafer.This gas chromatograph of only several hundred grams weight analyzes sample ten times faster than conventional GC with a detection limit of 10-6V/V and a few watt in power consumption.The manufacture process of this instrument is similar to that of semiconductor chips so that mass production with high reproducibility and very low cost which so completely different from the produedon of conventional GC can be accommplished.The basic design of this instrument and the principle of micro-machining is descrbed,practical applications are given and the key points of the development of thes GC is also discussed. |
HTML 查看全文 查看/发表评论 下载PDF阅读器 |