钼金属在离子减薄制样仪样品夹具材料中的应用

Application of Molybdenum Metal as Material for Sample Holder of Ion Beam Thinner

中文关键词:  钼金属  样品夹  离子减薄制样仪

英文关键词:molybdenum metal  sample holder  ion beam thinner

中文摘要:

      针对离子减薄制样仪的样品夹具易污染、变形失效等问题，提出了以钼金属替代普通不锈钢作为夹具材料，结合实践进行验证.结果表明：使用钼金属为夹具材料显著提高了离子枪及其重要部件的寿命，减少了工作舱的污染及样品间的交叉污染，提高了减薄样品的质量及其结构和元素分析的真实性，具有重要的应用价值.

英文摘要:

      Focusing on the problems of contamination and deformation failure of the sample holder in the ion beam thinner, molybdenum metal was used instead of ordinary stainless steel as the fixture material. The project was designed and verified in practice. The results showed that the use of molybdenum metal as the fixture material can significantly improve the life of the ion gun and its important components, reduce the pollution of the work chamber and cross-contamination between samples, and improve the quality of thinned samples and the trueness of the structure and element analysis. Therefore,the study has important application value.