XPS分析绝缘样品中磁透镜对中和效果的影响研究

Effect of Magnetic Lens on Neutralization for Insulating Sample in XPS

中文关键词:  X射线光电子能谱  绝缘样品  磁透镜  荷电中和  X射线源

英文关键词:X-ray photoelectron spectroscopy  insulating sample  magnetic lens  charge compensation  X-ray source

中文摘要:

      以绝缘样品聚对苯二甲酸乙二醇酯（PET）为X射线光电子能谱（XPS）分析测试对象，探讨了使用不同的X射线源作为激发源时，磁透镜对荷电中和系统中和效果的影响. 试验结果表明，当使用单色化Al Kα为激发源时，磁透镜对荷电中和器的中和效果没有显著影响. 而使用非单色化双阳极Mg Kα为激发源，磁透镜开启时才能得到良好的荷电中和效果，磁透镜关闭时所测谱峰会因荷电效应而发生峰形畸变.

英文摘要:

      The charge compensation plays an important role in the X-ray photoelectron spectroscopy (XPS) analysis for the insulating sample. According to the different X-ray sources used in XPS, the magnetic lens had different effect on the charge compensation for the insulating sample PET. The results showed that, magnetic lens has no obvious effect on the charge compensation when using a monochromatic Al Kα X-ray Source. When a non-monochromatic dual anode Mg Kα X-ray Source is used, good results in the use of magnetic lens are obtained.