扫描电镜附EDS能谱仪的使用与维护

Operation and Maintenance of SEM & EDS

中文关键词:  扫描电镜  能谱仪  制备  注意事项  维护

英文关键词:scanning electronic microscopy  energy dispersive spectrometry  preparation  attention  maintenance

中文摘要:

      简单描述了扫描电镜中几种样品的制备方法以及操作中需要注意的事项，例如参数的选择、和峰和逃逸峰的处理等，并结合实例进一步简述了如何进行日常保养和维护.

英文摘要:

      Several preparation methods of samples for SEM were introduced as well as the points for attention during the operation, such as the selection of parameters, the handling of sum peak and escape peak, etc, are briefly described. The daily care and maintenance with examples were also discussed in this paper.