低能离子散射谱分析中的荷电效应及中和作用

The Charging Effect and Neutralization in Low Energy ISS Analysis

中文关键词:  低能离子散射谱  荷电效应  中和作用

英文关键词:low energy ion scattering spectroscopy  charging effect  neutralization

中文摘要:

      用低能离子散射谱(ISS)对比分析了与样品托有良好电接触的和与样品托绝缘的金属银片.观察到荷电效应对ISS分析有严重影响.实验还表明在ISS分析时使用低能电子中和枪可以有效地消除荷电效应,还发现电子中和枪的使用对于惰性气体离子的中和作用无明显影响.

英文摘要:

      Two samples of silver sheet were analyzed by low energy ISS method. The sample 1 was earthed and sample 2 was floated during ISS analysis. It has been observed that serious charging effect occurred which caused the ion beam to be deflected for the electrically insulated sample 2, and the charging effect could be eliminated by using electron flood gun. Besides, it has been found that usage of electron flood gun did not increase the neutralization of inert gas ions.